Blasting and Spraying

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Spraying

In sputtering equipment, it is important to improve yield by generating fewer particles during coating and improve productivity by using an adhesion-preventing plate with a longer life in the chamber.
To achieve this, Toshiba Materials has developed SLR spraying technology that reduces particles by achieving extremely low surface roughness on the parts, and PDM spraying technology that lengthens the life of parts by creating the ideal surface structure.

Spraying

Features

  • Good adhesion of coating, preventing dust.
  • Minimal gas emission for stable coating
  • It is possible to suppress the occurrence of cracks and film peeling due to the thermal cycle.
  • Minimal wear, enabling ongoing use of parts.
  • Enables uniform surface roughness and coating thickness, even on parts with complicated shapes.

Spraying of adhesion prevention parts for sputtering devices

Spraying of adhesion prevention parts for sputtering devices

Application

  • For parts in the chambers of sputtering equipment
  • Production lines for semiconductors, LCDs, magnetic recording equipment, etc.
  • Appliances (due to wear resistance, conductivity and acoustic properties)
  • VTR drums, speakers, induction cooktops, hot plates, etc.
  • Automotive parts (due to wear resistance, sliding properties and resistance to formic acid corrosion)
  • Engine parts, brake parts, gearbox parts
  • Industrial machinery (due to wear resistance, corrosion resistance and heat resistance)
  • Guide rolls, guide pins and roller tables for steel production equipment
  • Other parts such as calendar rolls and doctor blades for paper production and printing equipment

HRG spraying

HRG spraying images
  • Features
    HRG spraying is a process in which rough, flat particles are layered and a smooth surface and undulation-based coating are formed to reduce the particle count and extend the life of the parts.
  • Applications
    Adhesion prevention parts for various sputtering equipment

HSA Spraying

HSA Spraying
  • Features
    HAS spraying is a process in which the bonding between the particles of the sprayed coating is strengthened and the coating is formed in a way that inhibits protrusions during spraying, reducing the particle count and extending the life of the parts.
    State of tantalum nitride sputter coating
    Standard spraying & HSA spraying
  • Applications
    Adhesion prevention parts for various sputtering equipment

HVGJ spraying

HVGJ spraying
  • Features
    In HVGJ spraying, ultra-fine particles are sprayed at a high speed, forming a smooth spray coating.
    This has the following effects:
    • Ideal surface roughness
    • Uniform surface roughness and controllable coating thickness
    • Reduction of particles by prevention of protrusions in coating
    • Longer life due to improvement of sprayed surface
  • Applications
    Adhesion prevention parts for various sputtering equipment

If you have any inquiries, please contact us.

Open 9:00am-5:00pm (business days)

Contact Us

Related product

  • sputtering Targets
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