Blasting and Spraying

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Spraying

In sputtering equipment, it is important to improve yield by generating fewer particles during coating and improve productivity by using an adhesion-preventing plate with a longer life in the chamber.
To achieve this, Toshiba Materials has developed SLR spraying technology that reduces particles by achieving extremely low surface roughness on the parts, and PDM spraying technology that lengthens the life of parts by creating the ideal surface structure.

Spraying

Features

  • Good adhesion of coating, preventing dust.
  • Minimal gas emission for stable coating
  • No cracking or peeling of coating caused by heat cycle.
  • Minimal wear, enabling ongoing use of parts.
  • Enables uniform surface roughness and coating thickness, even on parts with complicated shapes.

Spraying of adhesion prevention parts for sputtering devices

Spraying of adhesion prevention parts for sputtering devices

Application

  • For parts in the chambers of sputtering equipment
  • Production lines for semiconductors, LCDs, magnetic recording equipment, etc.
  • Appliances (due to wear resistance, conductivity and acoustic properties)
  • VTR drums, speakers, induction cooktops, hot plates, etc.
  • Automotive parts (due to wear resistance, sliding properties and resistance to formic acid corrosion)
  • Engine parts, brake parts, gearbox parts
  • Industrial machinery (due to wear resistance, corrosion resistance and heat resistance)
  • Guide rolls, guide pins and roller tables for steel production equipment and other parts such as calendar rolls and doctor blades for paper production and printing equipment

HRG spraying

HRG spraying images
  • Features
    HRG spraying is a process in which rough, flat particles are layered and a smooth surface and undulation-based coating are formed to reduce the particle count and extend the life of the parts.
    State of silicon dioxide sputter coating
    Standard spraying & HRG spraying
  • Applications
    Adhesion prevention parts for various sputtering equipment

HSA Spraying

HSA Spraying
  • Features
    HAS spraying is a process in which the bonding between the particles of the sprayed coating is strengthened and the coating is formed in a way that inhibits protrusions during spraying, reducing the particle count and extending the life of the parts.
    State of tantalum nitride sputter coating
    Standard spraying & HSA spraying
  • Applications
    Adhesion prevention parts for various sputtering equipment

HVGJ spraying

HVGJ spraying
  • Features
    In HVGJ spraying, ultra-fine particles are sprayed at a high speed, forming a smooth spray coating.
    This has the following effects:
    • Ideal surface roughness
    • Uniform surface roughness and controllable coating thickness
    • Reduction of particles by prevention of protrusions in coating
    • Longer life due to improvement of sprayed surface
    Comparison of life of continuous titanium nitride deposition coating (integral power until peeling occurs in coating)
    Comparison of life Spraled coating thickness, spray materials and method
  • Applications
    Adhesion prevention parts for various sputtering equipment

Ceramic Coating Using High-Velocity Solid Particulate Deposition Method

Toshiba Materials uses a high-velocity solid particulate deposition method to achieve previously impossible ceramic coatings. The high-velocity solid particulate deposition method is a form of technology that sprays the material by ultrasound and fuses the surface of the material instantaneously by collision energy to form the coating. This achieves a coating with almost none of the micro-cracks that occurred in the plasma spraying method used previously.

High-velocity solid particulate deposition method

Features

  • Forms a ceramic surface with outstanding corrosion (plasma) resistance, heat resistance (heat dissipation) and insulation performance.
  • Forms ceramic coatings that were not previously possible
    As this is a low-temperature process, the properties of the particle materials can be obtained in the coating (there is almost no phase transformation or degradation)
  • Particles are used as the coating material, achieving a coating with a high density and high adhesion strength
  • Enables coating of large substrates and substrates with complex shapes
  • Forms a coating faster than CVD and PVD, and enables thick coatings (50-100μm)
The high-speed solid particle deposition method uses a different principle

Product specifications

  • Y2O3 film to aluminum base material
  • Y2O3 film to Aluminum oxide base material

Examples of uses

  • Parts in the chambers of semiconductor production equipment (due to plasma resistance, heat resistance and heat dissipation)
    Improves yield and extends life by reducing particles (material: yttrium oxide)
  • Parts in the chambers of FPD and LED production equipment (due to plasma resistance, heat resistance and heat dissipation)
    Improves yield and extends life by reducing particles (material: yttrium oxide)
  • Cost reduction of heat-resistant and an insulating parts (material: Aluminum oxide)

If you have any inquiries, please contact us.

Open 9:00am-5:00pm (business days)

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Related product

  • Spattering Targets

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Blasting and Spraying

Spraying
Ceramic Coating Using High-Velocity Solid Particulate Deposition Method
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