sputtering Targets
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Contact UsTitanium Targets for Semiconductor Devices
We produce sputtering targets for thin film devices, helping to increase functionality in a wide range of electronic parts.
By making the metal structure fine and uniform, we have achieved low particle size from the initial stage of use to the end of life.
![Titanium Targets for Semiconductor Devices](../../images/product/co/co_sputtering/img-02.jpg)
Features
- Achieves low particle size by fine and uniform metal structure and surface treatment
Impurity content(Unit: ppm)
Grade | Fe | Ni | Cr | Na | K | O |
---|---|---|---|---|---|---|
5N UP | <9 | <5 | <5 | <0.03 | <0.05 | <200 |
4N5 UP | <20 | <20 | <20 | <0.1 | <0.1 | <200 |
4N UP | <50 | <20 | <10 | <0.1 | <0.1 | <650 |
3N5 UP | <200 | <20 | <10 | <0.1 | <0.1 | <1000 |
Examples of uses
- Semiconductor devices
Niobium Targets for Semiconductor Devices
We produce sputtering targets for thin film devices, helping to increase functionality in a wide range of electronic parts.
These targets have a fine, uniform metal composition and dramatically reduced impurities, resulting in films with outstanding properties such as glare prevention for displays.
![Niobium Targets for Semiconductor Devices photo](../../images/product/co/co_sputtering/img-03.jpg)
Features
- Dramatically reduced impurities and outstanding glare prevention for displays
Impurity content (Unit: ppm)
Grade | Fe | Ni | Cr | Na | K | O |
---|---|---|---|---|---|---|
Typical | <5 | <10 | <5 | <0.1 | <0.1 | <64 |
Examples of uses
- Glare-proof films
- For projectors
- For video cameras
- For DVD pickup
CrAlX Alloy Targets for Hard Thin Films
The effects of the additive elements are used to achieve a film that will not lose hardness in high temperatures. This hard film is ideal for extending the life of parts such as molds.
![CrAlX Alloy Targets for Hard Thin Films photo](../../images/product/co/co_sputtering/img-04.jpg)
Features
- High hardness even at high temperatures
Examples of uses
- Protective film for molds
If you have any inquiries, please contact us.
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