Spattering Targets

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Titanium Targets for Semiconductor Devices

We produce spattering targets for thin film devices, helping to increase functionality in a wide range of electronic parts.
The fine, uniform metal composition and target surface are optimized to generate minimal particles from the start of use to the end of the target's life.

Titanium Targets for Semiconductor Devices

Features

  • Metal composition and surface are optimized to generate minimal particles

Impurity content(Unit: ppm)

Impurity content : Titanium Targets for Semiconductor Devices
Grade Fe Ni Cr Na K O
5N UP <9 <5 <5 <0.03 <0.05 <200
4N5 UP <20 <20 <20 <0.1 <0.1 <200
4N UP <50 <20 <10 <0.1 <0.1 <650
3N5 UP <200 <20 <10 <0.1 <0.1 <1000

Examples of uses

  • Semiconductor devices

Niobium Targets for Semiconductor Devices

We produce spattering targets for thin film devices, helping to increase functionality in a wide range of electronic parts.
These targets have a fine, uniform metal composition and dramatically reduced impurities, resulting in films with outstanding properties such as glare prevention for displays.

Niobium Targets for Semiconductor Devices photo

Features

  • Dramatically reduced impurities and outstanding glare prevention for displays

Impurity content (Unit: ppm)

Impurity content analysis : Niobium Targets for Semiconductor Devices
Grade Fe Ni Cr Na K O
Typical <5 <10 <5 <0.1 <0.1 <64

Examples of uses

  • Glare-proof films
    • For projectors
    • For video cameras
    • For DVD pickup

CrAlX Alloy Targets for Hard Thin Films

The effects of the additive elements are used to achieve a film that will not lose hardness in high temperatures. This hard film is ideal for extending the life of parts such as molds.

CrAlX Alloy Targets for Hard Thin Films photo

Features

  • High hardness even at high temperatures
    Vickers hardness of hard coat films

Examples of uses

  • Protective film for molds

If you have any inquiries, please contact us.

Open 9:00am-5:00pm (business days)

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Related product

  • Blasting and Spraying

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Spattering Targets

Titanium Targets for Semiconductor Devices
Niobium Targets for Semiconductor Devices
CrAlX Alloy Targets for Hard Thin Films
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