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Product Information

For flat-panel display manufacturing

Aluminum alloy sputtering targets

Aluminum alloy sputtering targets

Microstructure of the metal

We have developed the most suitable sputtering targets for LCD wiring, which have fine, homogeneous dispersed inter-metallic compounds to obtain low electric resistance and desirable properties to suppress hillock production.

Temperature dependence of aluminum alloy film electric resistance by heat treatment

Molybdenum alloy sputtering targets

Molybdenum alloy sputtering targets

Atomic force microscope (AFM) observation of surface state of molybdenum alloy film

We have developed high-density, fine, homogeneous metallic structured large-scale single-body molybdenum alloy sputtering targets for coming-generation LCD manufacture.

Variation in resistivity of the inner surface of the substrate

Tantalum sputtering targets

Metallic microstructure

We offer tantalum sputtering targets that have a fine-grain microstructure to make homogeneous sputtering film.

FAQ

FAQ on sputtering targets

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