Silicon nitride (Si₃N₄) fine ceramics for industrial parts
Abrasion-resistant, thermal-resistant jigs

Outline

Toshiba Materials offers silicon nitride (Si₃N₄) ceramics parts, taking advantage of their excellent abrasion resistance, thermal shock resistance and low wettability to molten metals, for various industrial equipment. In particular, for semiconductor-manufacturing equipment, which require keenly low dusting and long serviceable life, we offer various jigs such as center bulbs, contact collets, masks and so on.