High-purity Metals

Outline

Thin film-making sputtering targets for various functional electronic parts and devices

Advantages

• Particles will be reduced by our optimal sputtering target designing.
• Improvement in efficiency by our own surface treatment
• Obtaining high purity by an oxygen-reduced process

FAQ

FAQ on sputtering targets

We offer spray coating technology to utilize the above-mentioned advantages.

Outline

There are two challenging themes for sputtering equipment. One is to improve the yield ratio by reducing particles that are produced during film making. The other is to improve productivity by elongating the serviceable life of the fittings inside the chamber, namely the deposition-protecting plates.

Toshiba Materials applies SLR spray coating to the components to reduce particles because it makes component surfaces very smooth. On the other hand, Toshiba Materials applies PDM spray coating to elongate serviceable life because it gives the component surfaces the most desirable structure.

Advantages

• Dusting or particle production is suppressed because of the good adhesion of deposited film.
• Film can be made despite low gas emission.
• There are no cracks or detachments of films by thermal cycling.
• The loss of surface treatment is so small that components can be used repeatedly.
• Surface roughness and film thickness can be secured even for complex-shaped components.

Applications

• Spray coating is applicable to the components inside the chamber of sputtering equipment.
  Semiconductors, LCDs, magnetic storage media and other manufacturing lines
• Home appliances (anti-abrasion, thermal conductivity and acoustic properties)
  VTR drums, speakers, IH cocking apparatus, hot plates, etc.
• Automobile parts (abrasion resistance, sliding property and formic acid resistance)
  Engine parts, brake parts, gear boxes, etc.
• Industrial equipment (abrasion resistance, corrosion resistance, thermal resistance)
  Guide rolls, guide pins, roller tables, etc. for iron- and steel-making equipment
  Calendar rolls and doctor blades for paper-making and printing equipment

Example: Spray coating for masking parts for sputtering equipment