PDM spray coating
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Advantages
PDM spray coating suppresses film detachment by relieving stress from sputtered films so that it elongates the serviceable life of coatings. PDM spray coating is agreeably applicable to such sputtering equipment that makes highly stressed films.
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Applications
Sputtering equipment for TiN, Wsi, W, Tiw and TaN films
Examples
Comparison of serviceable lives by spray-coating processes when they continuously produce TiN deposition. (Total power consumption before film detachment)

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